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33 records found



1.    Iamboliev, T., S. Katayama, et al. (2002). Formation Mechanism of Rapidly Quenched Microstructure of Laser Weld Metals in Austenitic Stainless Steels. Trends in Welding Research: Proceedings of the 6th International Conference, Phoenix, Arizona, USA.

Microstructural characteristics and the relationship between cellular dendritic growth direction and crystal orientation were investigated in laser weld fusion zones of austenitic stainless steels through optical microscopy observation and electron backscattered diffraction patters analyses. Type 310S was confirmed to be solidified as an austenitic single phase of cellular dendritic growth with the <100> preferred orientation in any weld metals, and grains in weld fusion zones grew epitaxially from the HAZ. On the other hand, in Type 304, lacy, skeletal or globular ferritic microstructure to nearly fully austenitic structure were observed depending on pulse duration, or solidification and cooling rates. In the case of normal solidification, growth direction of cellular dendrites was in good agreement with the <100> orientation of not austenite but ferrite phase, where K-S relationship existed between the ferrite and austenite phases. Similarly, during rapid solidification, fully austenitic structure was observed, the number of austenite grains increased, and the growth direction of cells did not correspond with the <100> orientation of austenite phase. It is consequently revealed that fully austenitic microstructure of rapidly solidified Type 304 steel was formed not as a result of metastably or massively austenitic solidification but due to the ferrite-to-austenite solid-state transformation after the primary ferrite solidification.





2.    Ibarra, A., A. Iza-Mendia, et al. (2004). "Influence of thermo-mechanical processing on the microstructure of Cu-based shape memory alloys produced by powder metallurgy." Materials Science and Engineering A 378(1-2 (Special Issue)): 263-268.

Cu-Al-Ni shape memory alloys processed by powder metallurgy show very good thermo-mechanical properties, much better than those found in alloys produced by conventional casting. In this paper, we present the microstructural characterisation of these powder metallurgy alloys in order to find the microscopic mechanisms, linked to the powder metallurgy processing method, which are indeed responsible of such good thermo-mechanical behaviour. Electron microscopy studies scanning electron microscopy (SEM), electron backscatter diffraction (EBSD) and transmission electron microscopy (TEM) show that powder metallurgy processing creates a sub-grain structure characterised by the presence of low angle sub-boundaries. These sub-boundaries are found to be lying on {1 1 0} and {1 1 2} lattice planes and are composed by an arrangement of superdislocations. These sub-boundaries may improve ductility in two ways: acting as a sink of dislocations which promotes plastic deformation and decreasing stress concentration at grain boundaries. Moreover, since sub-boundaries act as weak obstacles for the movement of martensite plates, the improvement on ductility is accomplished by an adequate thermo-mechanical behaviour. Copyright 2004 Published by Elsevier B.V.





3.    Ichikawa, M. and K. Hayakawa (1982). "Micro-Probe Reflection High-Energy Electron-Diffraction Technique.1. Determination of Crystallographic Orientations of Polycrystal-Silicon Surfaces." Japanese Journal of Applied Physics Part 1 21(1): 145-153.





4.    Ichinohe, Y., H. Ishii, et al. (1996). "Site-Specific Characteristic of the Kikuchi-Like Bands in High-Angular-Resolution X-Ray Photoelectron Diffraction." Japanese Journal of Applied Physics Part 2 35(5A): L587-L590.





5.    Ihara, K. and Y. Miura (2004). "Dynamic recrystallization in Al-Mg-Sc alloys." Materials Science and Engineering A 387-389: 647-650.

The main research interest was to investigate the mechanisms in the restoration process of Al–3 mass% Mg and Al–3 mass% Mg–0.2 mass% Sc alloy containing second-phase Al3Sc precipitates. The alloy specimen, Al–3% Mg–0.2% Sc, was peak-aged, where it contained stable coherent, spherical Al3Sc precipitates with an average diameter of 0.2 m and a volume fraction of 0.005. The main techniques utilized are compression tests, optical microscopy, the Laue X-ray method, the electron backscattering pattern method using a scanning electron microscopy and transmission electron microscopy (TEM). The observed fluctuation of the stress–strain curves and grain growth during high temperature deformation strongly suggested the occurrence of dynamic recrystallization during hot deformation of the alloy. The transmission Laue method revealed new undeformed spots formed during deformation, which directly shows that new grains have been generated. TEM observation revealed the areas of high dislocation density at the immediate vicinity of the particles in hot deformed conditions. In the ternary alloy (Al–3% Mg–0.2% Sc), dynamic recrystallization seems to occur more frequently than in the binary alloys (Al–3% Mg) through grain boundary bulging. These observations lead to a hypothesis that dynamically recrystallized grains in the present study were nucleated by the combined effects of stress induced grain boundary bulging and preferential hardening at the sites of Al3Sc precipitates near grain boundaries.





6.    Ihara, K. and Y. Miura (2004). "Dynamic recrystallization in Al-single crystals revealed by synchrotron radiation Laue technique." Materials Science and Engineering A 387-389: 651-654.

An experimental study on the microstructure development and stress–strain behavior during high temperature deformation of aluminum (Al) single crystals was made by using the synchrotron radiation Laue technique and the electron backscatter pattern technique. The main purpose was to clarify the process of dynamic recrystallization (DRX). The measured stress–strain curves with large stress peaks and the in situ observed new Laue spots without streaks at around the stress peaks confirmed the occurrence of DRX. Crystallographic analysis shows that the common axis between the DRX grain and the matrix is close to <1 1 2>. The unrecrystallized region near the DRX grain consists of subgrains adjoined each other with <1 1 2> tilt boundaries and the size of subgrains becomes smaller and the misfit at subgrain boundaries becomes larger as the DRX grain boundaries are approached. These experimental results suggest that DRX grains are nucleated through the development of subgrains.





7.    Ikuhara, Y. (2001). "Grain-Boundary and Interface Structures in Ceramics." Journal of the Ceramic Society of Japan 109(7): S110-S120.





8.    Iliescu, D., Ian Baker, et al. (2004). "Determining the Orientations of Ice Crystals Using Electron Backscatter Patterns." Microscopy Research and Technique 63: 183-187.

Knowing the orientations of the ice crystals in a polycrystalline aggregate is essential for understanding and modeling the flow of naturally occurring ice. Here we show, for the first time, that the orientation of crystals in polycrystalline ice can be determined with a higher angular and spatial resolution and more rapidly than any currently used method by using electron backscatter patterns (EBSPs) in a cold-stage equipped scanning electron microscope. We also present an orientation image map constructed from EBSPs, and discuss possible applications of the technique for ice. The results indicate that obtaining EBSPs and orientation images from other frozen water-containing materials, such as clathrate hydrates, may also be possible.





9.    Ilievski, D., P. Austin, et al. (2003). "Studies into the Internal Structure of Gibbsite Agglomerates." Chemical Engineering Technology 26(3): 363-368.





10.    Imamura, T., Y. Hayakawa, et al. (2002). Formation Mechanism of Recrystallization Nuclei in Polycrystalline a-Fe. ICOTOM 13, Seoul, Korea, Trans Tech Publications Inc.

Cold rolling texture of polycrystalline 3%Si-Fe were investigated using high-resolution Electron Backscattered Diffraction (EBSD) method. From the measurement, there are deformation bands with {12 4 1}<014> in a deformed grain. It turned out that the orientation relationship between deformation bands and surrounding deformed grain can be explained by the orientation rotation caused by the activation of the slip system which has a common slip plane with an adjacent grain. {12 4 1}<014> orientation was one of the major components in the recrystallized texture. A hypothesis that recrystallization nuclei is generated directly from the deformation bands formed by an activation of the slip system that has a common slip plane of neighboring deformed grains was proposed from the present experimental results.





11.    Imamura, T., Y. Hayakawa, et al. (2003). "Observation of Cold-Rolling Texture and Partially Recrystallixed Texture in Polycrystalline 3 pct Si-Fe by High-Resolution Electron Backscattered Diffraction." Metallurgical and Materials Transactions A 34A(No. 2): 403-408.

Cold-rolling texture and partially recrystallized texture of polycrystalline 3 pct Si-Fe were investigated using high-resolution electron backscattered diffraction (EBSD) method. From the measurement on a deformed grain with {211}<011> ~ {111}<011> orientations, deformation bands with {12 4 1}<014> orientation were found. It turned out that the orientation rotation relationship betwen deformation bands and surrounding deformed grain can be explained by the activation of the slip system, which has a common slip plane with an adjacent grain. Oriented nucleation of recrystallized grains with {12 4 1}<014> orientation was observed in a deformed grain with {211}<011 ~ {111}<011> orientation. Exactly the same orientation relationship that was observed between deformed grain and the deformation bands was also observed between the deformed grain and the recrystallized grain. A hypothesis that recrystallization nuclei are generated directly from the deformation bands formed by an activation of the slip system that has a common slip plane of neighboring deformed grains was proposed from the present experimental results.





12.    Imayev, R. M., O. A. Kaibyshev, et al. (1992). "Mechanical-Behavior of Fine-Grained TiAl Intermetallic Compound.2. Ductile-Brittle Transition." Acta Metallurgica et Materialia 40(3): 589-595.





13.    Imayev, R. M., O. A. Kaybyshev, et al. (1991). "Mechanical-Properties of Fine-Grain TiAl Intermetallide.2. Brittle-Tough Transition." Fizika Metallov I Metallovedenie(3): 179-187.





14.    Inagaki, H. (2005). "Recent Progress and Related Problems in Texture Investigations -Problems and Limitations in Taylor's Model." Journal of the Japan Institute of Metals 69(3): 283-290.

Recent trends in the field of texture investigations are briefly reviewed. ODF and EBSP analyses have made most significant contribution to the progress in the texture investigations. Owing to the development of these two experimental techniques, we can now not only quantitatively evaluate textures of various materials, but also we can directly correlate the distribution of main texture components with the observed microstructures. As to the theoretical investigations, the development of rolling textures of various metals has been intensively studied by using Taylor's model. In this paper, the validity of the basic assumption of the homogeneous deformation adopted in this model is critically examined in detail. All metallographic observations made on cold rolled pure Fe and Al do not support this assumption. It is strongly suggested that dislocation substructures developed during cold rolling strongly affect the development of cold rolling textures.





15.    Inagaki, H. and A. Umezawa (2005). Origins of Cube Recrystallization Texures in Heavily Rolled High Purity Al. Textures of Materials - ICOTOM 14, Leuven, Belgium, Trans Tech Publications.

In high purity (4N) Al containing 50 ppm Cu, very strong cube textures can be developed by cold rolling 98 % and annealing at 500 ºC. The orientation density in this material amounted to as much as 220 times random, i. e. about 3 times stronger than that observed in standard 4N Al. It is expected that the origins of cube textures should be most unambiguously clarified by using this material. Commercial hot bands of this materials were cold rolled 98 % to the thickness of 132 μm and isothermally annealed at 230 ºC. Detailed EBSP analyses were made both on the rolling plane and on the longitudinal section at each stage of annealing. It was found that in the hot band of this high purity Al, cube orientations were mostly rotated away into other orientations due to low temperature hot rolling with high rolling reductions. Therefore, regions having cube orientations were very few. They were not present in the form of so called cube bands, which had been reported in previous investigations, but in the form of isolated, rather equi-axed recrystallized grains. After 98 % cold rolling, these remaining cube regions were fragmented, and further rotated away into other orientations, so that only very few cube oriented regions were observed in the cold rolled materials. However, it was from such deformed cube oriented regions that the most potential exact cube recrystallized grains were formed. They were nucleated much earlier and grew much faster than grains of other orientations.





16.    Inagaki, H. and A. Umezawa (2006). "Formation of cube recrystallized grains in high-purity Al." Materials Research and Advanced Techniques 97(1): 49-58.

In high-purity 4 N (99.99 wt.%) Al containing 50 wt.ppm Cu, very strong [100] &;lt;001&;gt; recrystallization textures are developed after 98% cold rolling and annealing at 500 C. They are about three times stronger than those observed in standard high-purity 4 N Al without Cu addition. In this paper, the mechanism of the formation of such strong [100]}&;lt;001&;gt; recrystallization textures were investigated in detail by using the EBSP (electron backscatter pattern) analysis. It was found that, at the earliest stage of recrystallization,[100]&;lt;001&;gt;-recrystallized grains were nucleated by forming a row lying parallel to the rolling direction and growing preferentially within the elongated deformed grain in which they were nucleated. Most of these [100]&;lt;001&;gt;-recrystallized grains had orientations very near to the exact cube orientations.[100]&;lt;001&;gt;-recrystallized grains in this materials were characterized by their rapid growth, which was observed at the later stages of recrystallization. Since they were surrounded by deformed regions having very strong {beta}-fiber rolling textures formed by heavy cold rolling, their grain boundaries were high-angle grain boundaries with high mobility. Assisted further by high stored energy introduced by heavy rolling reductions,[100]&;lt;001&;gt;-recrystallized grains could grow very rapidly, traversing readily several deformed grains. In this material,[100]&;lt;001&;gt;-recrystallized grains were not nucleated so abundantly. However,[100]&;lt;001&;gt;-recrystallized grains were nucleated much earlier and grew much faster than recrystallized grains with other orientations. They were, therefore, always larger than recrystallized grains with other orientations. Due to such size advantages, [100]&;lt;001&;gt;-recrystallized grains could rapidly consume fine-recrystallized grains with other orientations during the subsequent grain growth process. As a result, microstructures observed after annealing at 500 C for 2 h consisted mostly of coarse [100], &;lt;001&;gt;-recrystallized grains slightly misoriented with each other. It is, thus, rapid growth of few [100]&;lt;001&;gt;-recrystallized grains during recrystallization, and their preferential grain growth, that enhance the development of very strong [100]}&;lt;001&;gt; recrystallization textures in this high-purity Al. Cu seems to suppress nucleation of recrystallized grains with other orientations.





17.    Inokuti, Y., H. Morita, et al. (2003). "Twin Morphology Formed on Goss Si-steel Single Crystal." Journal of the Iron and Steel Institute of Japan 89(6): 686-690.

The twin morphology of Goss single crystal of silicon steel was investigated using electron back scattering diffraction (EBSD) method of FESEM, and was compared with that of FE-SEM. The orientation analysis parallel to ND, RD and TD showed a very narrow band of about 3 mu m width perpendicular to the rolling direction. The twin formed between the boundary of the Goss single crystal matrix and the very narrow band. This boundary showed step-like morphologies of about 70-200 nm. The angle between the two (110) orientations of the (211) twin was 70,5 deg. The origin of twin due to the alternate formation of twin boundary was also observed, It is suspected that this permitted to do the formation energy of twin as low as possible.





18.    Inoue, H., M. Ishio, et al. (2002). Texture and Shape Memory Effect of TiNi Alloy Produced from Ti/Ni Laminated Sheets. ICOTOM 13, Seoul, Korea, Trans Tech Publications Inc.

We have developed new processing to produce thin TiNi alloy sheets. This processing is composed of repetitive roll-bonding for making a Ti/Ni laminated sheet from Ti and Ni, and of subsequent heat treatment for leading to reactive diffusion. The Ti/Ni laminated sheet changed to a nearly single TiNi phase material throgh the formation of Ti2Ni and Ni3Ti intermetallc phases by solid phase reaction. The TiNi sheet consisted of a near <111>//ND texture such as {223}<110> in the B2 parent phase. Planar anisotropy of shape memory strain was not pronounced in this material due to an isotropic character of the {111}<uvw> texture. The formation of such texture by reactive diffusion has been discussed in view of texture inheritance.





19.    Irvine, J. and T. N. Baker (1984). "The Influence of Rolling Variables on the Strengthening Mechanisms Operating in Niobium Steels." Materials Science and Engineering 64(1): 123-134.





20.    Isabell, T. C. and P. E. Fischione (2000). Plasma Cleaning for Electron Microscopy. 7th Asia-Pacific Electron Microscopy Conference, Singapore, Times Publishing Group.





21.    Isabell, T. C. and V. P. Dravid (1997). Electron Backscattered Diffraction (EBSD) with a Cold Field Emission Gun (cFEG) SEM: Resolution, Sensitivity and Applications. Microscopy and Microanalysis 1997, Cleveland, Ohio, Springer.





22.    Isabell, T. C. and V. P. Dravid (1997). "Resolution and sensitivity of electron backscattered diffraction in a cold field emission gun SEM." Ultramicroscopy 67(1-4): 59-68.

The tradeoff between sensitivity and spatial resolution is inherent in all analytical techniques. Electron backscattered diffraction (EBSD) in a scanning electron microscope (SEM) is no exception, and determining this tradeoff for EBSD is the focus of this contribution. Because the specimen is tilted in EBSD (typically at 70 degree), the spatial resolution needs to be defined with respect to three orthogonal directions; as lateral resolution (within the specimen plane but normal to beam direction), longitudinal resolution (within the specimen plane but parallel to beam direction) and depth resolution (extent of depth information). The significance of these different resolution criteria becomes relevant for interface analysis, and is demonstrated using a variety of materials systems and electron-optical parameters. The sensitivity of EBSD is directly related to the ability of backscattered electrons (BSEs) to produce sufficient contrast in the Kikuchi pattern at the recording medium (phosphor in our case). The various parameters which govern the sensitivity of EBSD are discussed with the help of experimental analysis. It is argued that EBSD/OIM is a viable technique even in a cold field emission gun SEM, where there is less absolute current available and stability of current is less than for other electron sources. (Author abstract) [References: 20]





23.    Ishihara, R., M. He, et al. (2005). Electrical property of coincidence site lattice grain boundary in location--controlled Si island by excimer--laser crystallization. International Conference on Polycrystalline Semiconductors-Materials, Technologies, Device Applications, Switzerland.

Two-dimensional location control of large Si grains by, so-called, μ-Czochralski process with excimer-laser crystallization enables formation of thin-film transistors inside a grain; single-grain Si TFTs. In this study, the effect was studied of remaining defects inside the location-controlled grains on the electrical performance of single-grain Si TFTs. From electron backscattering diffraction analysis, it was found that most of the defects inside the location-controlled grains are coincidence site lattice (CSL) boundary of Σ3, followed by Σ9 and Σ27. If such CSL boundary is parallel to the current flow direction, the field effect mobility of the TFT is 597 cm2/Vs. When the Σ9 boundary is perpendicular to the current flow, the mobility decreases to 360 cm2/Vs, suggesting electrical activity in the Σ9 boundary.





24.    Ishii, H., J. D. Mun, et al. (1996). "Faceted voids and grain orientation at solid state diffusion bonded interfaces between Cu and single crystal cubic ZrO2." Materials Science Forum 207-209(pt 1): 253-256.

We have investigated the morphology of the non-reactive solid state diffusion bonded interfaces between polycrystalline copper and single crystal zirconia of (100) and (110) orientations. The bonded interfaces showed regular faceted voids on the Cu side. The angles of the faceted void edges to the left bracket 001 right bracket direction of the ZrO2 is dependent on the crystallographic orientation of the ZrO2. To examine the relationship between the Cu grains that showed faceted voids and the ZrO2, the orientation of the Cu grains were measured using Electron Back Scattering Diffraction (EBSD) in the scanning electron microscope. These misorientations are shown in a Frank-Rodrigues map and the dependence on bonding conditions is discussed. (Author abstract) [References: 5]





25.    Ishimoto, S., K. Nogita, et al. (2004). "Crystallography of zirconium hydrides in recrystallized zircaloy-2 fuel cladding by electron backscatter diffraction." Journal of Nuclear Science and Technology 41(7): 731-740.

Precipitation morphology and habit planes of the δ-phase Zr hydrides, which were precipitated within the α-phase matrix grains and along the grain boundaries of recrystallized Zircaloy-2 cladding tube, have been examined by electron backscatter diffraction (EBSD). Radially-oriented hydrides, induced by residual tensile stress, precipitated in the outside region of the cladding, and circumferentially-oriented hydrides in the stress-free middle region of the cladding. The most common crystallographic relationship for both types of the hydrides precipitated at the inter- and intra-granular sites was identical at (0001)α // {111 }δ, with {101-7}α // {111 }δ being the occasional exception only for the intergranular radial hydrides. When tensile stress was loaded, the intra-granular hydrides tended to preferentially precipitate in the grains with circumferential basal, pole textures. The inter-granular hydrides tended to preferentially precipitate on the grain faces opposite to tensile axis. The change of prioritization in the precipitation sites for the hydrides due to tensile stress could be explained in terms of the relaxation effect of constrained elastic energy on the terminal solid solubility of hydrogen at hydride precipitation.





26.    Islamgaliev, R., R. Valiev, et al. (2004). "Microstructural aspects of superplasticity in the 1420 and 1421 aluminum alloys." JOM 56(11): 220.

Various temperatures of equal-channel angular pressing (ECAP) were applied to commercial aluminum alloys 1420 and 1421 for grain refinement. The microstructures were examined using transmission electron microscopy (TEM), energy-dispersion analysis (EDS) and electron back scattering diffraction (EBSD). Special attention was paid to investigations of structure evolution during in-situ heating in column of microscope up to temperature of superplastic deformation. It was found that microstructure of the ECAP samples at room temperature consisted of both the equiaxed grains with mainly high angle grain boundaries and precipitates of various phase composition (Al2LiMg, AlLi, Al3Zr). Small tensile specimens (gage section 1x2.5x5 mm3 and 1x1x0.3 mm3) were sectioned along the length the billets by electrospark machining. Tensile testing showed these materials are superplastic at temperature 400 orphology C with elongations 1500-1600% at strain rates 10-2-10-1 c-1. The difference between microstructure and superplastic properties of specimens processed at various ECAP temperatures 340-420oC is considered. Microstructural aspects of superplasticity in ultrafine-grained aluminum alloys are discussed.





27.    Ito, K., T. Hayashi, et al. (2003). Oxidation Behavior of Mo-based Alloys Coated with Silicide Using the Halide-activated Pack Cementation Method. Thermec' 2003, Leganés, Madrid, Spain, Trans Tech Publications Ltd.

This article summarizes recent progress in research on oxidation behavior of pack-cemented Mo-9Si-18B alloys with a Mo5SiB2/Mo two-phase eutectic microstructure. The deposited layer of as-cemented Mo-9Si-18B alloy consists of MoSi2. Upon heating to temperatures above 1500° C, the deposited layer is transformed into B-doped Mo5Si3 through a reaction between the deposited layer and the matrix containing B. Steady-state oxidation is observed at 1300 - 1500° C and its rates are almost equal to those of MoSi2. No significant increase in weight loss was observed in a short-term cyclic oxidation test, since the columnar structure with orientation preference in B-doped Mo5Si3 coating layer must be reduced thermal stress in the cyclic oxidation test.





28.    Ito, K., T. Hayashi, et al. (2005). "Oxidation Protective Silicide Coating on Mo-Si-B Alloys." Metallurgical and Materials Transactions A 36A(3): 627-636.

A MoSi2coating was successfully formed on a Mo-9Si-18B alloy, consisting of Mo5SiB2 (T2) and Mo solid solution (Moss) phases, using pack cementation with Si. Isothermal and cyclic oxidation tests of pack-cemented Mo-9Si-18B alloys were performed at 1300 °C and 1500 °C. Steady-state oxidation rates at both temperatures are almost equal to those of pure MoSi2. The MoSi2 layer is completely transformed into Mo5Si3 (T1) containing B after oxidation at 1500 °C for 24 hours. Thermal expansion of the T1 phase is anisotropic, but a [001] texture in the growth direction for the columnar grains in the T1 layer reduces thermal stresses generated around the phases. Evolution of T1 layers during oxidation between 1300 °C and 1500 °C was investigated; their growth rate constants and the interdiffusion coefficient of Mo and Si in the Mo-Si-B system have been evaluated and compared with those in the binary Mo-Si system. Furthermore, we have studied phase transformations in a simpler system MoSi2 vs T2using MoSi2/T2 diffusion couples. Layers of T1 and MoB + T1 were formed in the diffusion zone during oxidation at temperatures between 1400 °C and 1600 °C. This behavior is different from that of the pack-cemented Mo-9Si-18B alloy. Pack-cemented T2 single crystals show a diffusion structure similar to that of MoSi2/T2 diffusion couples, but the ratio of layer thickness is different. Based on these diffusion results, a method for extending the lifetime of the MoSi2 layer is proposed.





29.    Ivanisenko, Y., R. Z. Valiev, et al. (2005). "Grain boundary statistics in nano-structured iron produced by high pressure torsion." Materials Science and Engineering A 390(1-2): 159-165.

The microstructure and the spectrum of grain boundary misorientations were studied in Armco iron, following high pressure torsion (HPT) deformation, by means of transmission electron microscopy (TEM) and orientation imaging microscopy (OIM). It was found that HPT deformation results in the formation of an equiaxed grain structure with a mean grain size of 270 and 130nm using a shear strain of γ =210 and 420, respectively. The misorientation spectra in HPT iron have a bimodal character with maxima in low (at 1-2 degrees) as well as in high misorientation angle ranges. A marked increase in the fraction of special boundaries (Σ 3- Σ 45) was revealed as a result of HPT. The microstructural changes due to HPT are discussed and compared with those obtained during conventional deformation modes.





30.    Ivanov, I. and A. Kolics (2005). On compensation of copper crystallographic orientation effect in CoWP electroless deposition. 208th Meeting of The Electrochemical Society, Los Angeles, California, USA.

As IC interconnect minimum line width continues to shrink the crystallographic orientation of dual damascene Cu grains, their size change dramatically from a highly textured (111) films with large grains to a randomly oriented small grains1. High density of interface boundaries and vacancies in a small line or via results in reduced stress migration reliability and increased Cu resistivity due to accumulated residual impurities from copper electroplating. One of the methods to improve Cu interconnect electromigration and stress migration is a deposition of a self-aligned conductive CoWP cap on Cu pattern immediately after CMP process in a standard dual damascene process with blanket dielectric barrier and etch stop.2 However, the use of a Co alloy cap can also provide the additional advantage of a complete elimination of a dielectric barrier with relatively high k-value thus improving Keff of interlayer dielectric stack, increasing available thermal budget, and reducing cost of 1C manufacturing by reducing number of process steps. The CoWP conductive self-aligned cap is deposited using an electroless deposition process directly onto post-CMP Cu surface without Pd activation but with prior in-situ removal of atmospheric and post-CMP cleaning residues using aqueous solutions with a controlled concentration of dissolved gases such as oxygen or CO2. Several CoWP deposition chemistries have been developed and the differences in CoWP film morphology as a function of Cu grain orientation were studied using AFM, EBSD, and electrochemical methods. Co and W reduction and DMAB / hypophosphite oxidation partial reactions were studied at various temperatures using CoWP electroless processes from ammonia and TMAH-based formulations. The role of stabilizing agents and some organic additives on initiation and deposition processes and resulting film properties were also investigated. It was found that a significant surface roughness of CoWP deposited from NH3-based formulation (Fig.1) can be reduced by at least an order of magnitude by deposition of a CoWP film from a recently developed tetramethylammonium-based formulation. The effect of O2 concentration during copper preclean in the production process chamber was evaluated (Fig. 3) and optimum ambient was selected to minimize the Cu surface roughness before CoWP deposition.





31.    Ivanov, I. and A. Kolics (2005). On compensation of copper crystallographic orientation effect in CoWP electroless deposition. 208th Meeting of The Electrochemical Society, Los Angeles, California, USA.

As IC interconnect minimum line width continues to shrink the crystallographic orientation of dual damascene Cu grains, their size change dramatically from a highly textured (111) films with large grains to a randomly oriented small grains1. High density of interface boundaries and vacancies in a small line or via results in reduced stress migration reliability and increased Cu resistivity due to accumulated residual impurities from copper electroplating. One of the methods to improve Cu interconnect electromigration and stress migration is a deposition of a self-aligned conductive CoWP cap on Cu pattern immediately after CMP process in a standard dual damascene process with blanket dielectric barrier and etch stop.2 However, the use of a Co alloy cap can also provide the additional advantage of a complete elimination of a dielectric barrier with relatively high k-value thus improving Keff of interlayer dielectric stack, increasing available thermal budget, and reducing cost of 1C manufacturing by reducing number of process steps. The CoWP conductive self-aligned cap is deposited using an electroless deposition process directly onto post-CMP Cu surface without Pd activation but with prior in-situ removal of atmospheric and post-CMP cleaning residues using aqueous solutions with a controlled concentration of dissolved gases such as oxygen or CO2. Several CoWP deposition chemistries have been developed and the differences in CoWP film morphology as a function of Cu grain orientation were studied using AFM, EBSD, and electrochemical methods. Co and W reduction and DMAB / hypophosphite oxidation partial reactions were studied at various temperatures using CoWP electroless processes from ammonia and TMAH-based formulations. The role of stabilizing agents and some organic additives on initiation and deposition processes and resulting film properties were also investigated. It was found that a significant surface roughness of CoWP deposited from NH3-based formulation (Fig.1) can be reduced by at least an order of magnitude by deposition of a CoWP film from a recently developed tetramethylammonium-based formulation. The effect of O2 concentration during copper preclean in the production process chamber was evaluated (Fig. 3) and optimum ambient was selected to minimize the Cu surface roughness before CoWP deposition.





32.    Ivanov, V. A., D. A. Molodov, et al. (2004). On the Effect of “Surface Triple Junction” on Grain Boundary Motion. Second Joint International Conference on Recrystallization and Grain Growth, ReX & GG2, SF2M, Annecy, France, Trans Tech Publications Ltd.





33.    Iza-Mendia, A., M. L. No, et al. (2003). "Electron microscopy study of microtexture in Cu-Al-Ni shape memory alloys processed by powder metallurgy." Journal De Physique IV 112(I): 615-618.

Cu-Al-Ni shape memory alloys processed by powder metallurgy show very good thermomechanical properties, being the mechanical behavior similar to the one observed in single crystals. In this paper we present the microstructural characterization of a sample elaborated by powder metallurgy in two different stages of the process: after being compacted by Hot Isostatic Pressing (HIP) and after compaction and hot rolling, in order to find the microscopic mechanisms responsible of their mechanical behavior. The characterization has been carried out by means of Scanning Electron Microscopy using Backscattered Electron Imaging (SEM-BSE) and Electron BackScattered Diffraction (EBSD), as well as Transmission Electron Microscopy (TEM).





33 records found

 

 

 
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